Microelectromechanical systems (MEMS) are hybrid systems consisting of microelectronic devices and mechanical parts, typically with a size of under one micrometer. Through a series of micro-fabrication processes, MEMS devices integrate electronic processing and mechanical actuation functions, enabling a wide range of applications. MEMS devices have been used to create products such as Nintendo Wii consoles, gyroscopes in mobile phones, printers’ piezoelectric elements, dynamic control and stabilization systems in automobiles, and miniature projectors, among others.

In the field of smart sensing, ITRI made its debut around 2000 by establishing Taiwan’s first microelectromechanical production line. In 2001, ITRI shared its manufacturing innovations, equipment operation knowledge, and plant designs of the production line with Walsin Lihwa Corp. This marked Taiwan’s first turn-key project in the smart sensing industry. In 2003, ITRI formed an alliance for microelectromechanical systems to provide equipment and technologies to industry players, facilitating the development of advanced manufacturing processes and product technologies.

Since then, ITRI has been determined to extend its presence in the field of smart sensing. In 2008, the institute developed Taiwan’s first microelectromechanical microphone. This was followed by a collaboration with Universal Cement Corporation Taiwan (UCCTW) in 2010 to build a flexible pressure sensor, which advanced the traditional industry business for the advent of the electronics industry. In 2013, ITRI unveiled a triaxial accelerometer and a hexa-axial inertial sensing component, which are turned into an innovation spin-in. This effort gave rise to the IC giant Richtek Technology Corporation, whose innovative sensor department was founded and led by ITRI.

ITRI has continued to make impressions in the field of smart sensor technologies. Its recent research achievements include gas sensors, low driving voltage microphone sensing components, Taiwan’s first domestically produced PM2.5 air-quality sensor, Taiwan’s first domestically produced vibration sensor, single-photon sensors, and thermal imaging sensors. The vibration sensor is designed to predict the service life of spindles/bearings and was later transferred to various companies, including Far Eastern Textile Ltd., FATEK, and Chum Power for beta testing. Those innovations have paved the way for the development of various application, including alcohol-detecting chip, air-quality monitoring systems, LiDAR chips, smart manufacturing equipment pre-diagnosis systems, and thermal imaging security systems.