Major Milestones
Developing Advanced Measurement Technologies to Increase the Global Competitiveness of Local Industries
A measurement error of even 1 mm could severely affect the quality of a product. Through its prowess in measurement standards, ITRI is continuously enhancing both its measurement technologies and its testing and verification services so that the quality of Taiwan’s products meets international standards. Products in precision technology industries, such as semiconductors, energy, pharmaceuticals, and aerospace must be precisely measured to ensure that they meet international standards and regulations as well as possess the most advanced market competitiveness.
ITRI maintains Taiwan’s measurement standards through the operations of the National Measurement Laboratory (NML). The laboratory also develops forward-looking measurement technologies and provides testing and verification services to assist industry in enhancing manufacturing capabilities.
In 1991, ITRI completed the optoelectronic 3D object surface measurement system. This was a new high-performance inspection and measurement technology which elevated Taiwan’s performance in the field of automation. Three years later the Optoelectronic Semiconductor Measurement Laboratory was established with focuses on analyzing, researching, and testing optoelectronic semiconductor materials and component features. It was the first LED measurement laboratory in Taiwan to receive Chinese National Laboratory Accreditation (CNLA) certification and began to provide solid-state lighting product testing services after obtaining accreditation from the National Voluntary Laboratory Accreditation Program (NVLAP).
In 1998, ITRI was recognized as Asia’s first 510(k) medical device third-party review organization by passing US FDA review. In so doing it came into service as a review organization for 510(k) Premarket Notification of Class II Medical Devices. ITRI supported the entry of 11 types of medical devices manufactured in Taiwan into the US market and served as a platform for Taiwan and American medical device management and collaboration.
In 2000, ITRI developed Taiwan’s first dynamic signal 3 GHz spectrum analyzer which could be applied in measuring communication products. In 2004, ITRI’s Center for Measurement Standards completed Taiwan’s first set of traffic signal sunlight testing systems; and in 2007, the center became the first agency in Taiwan to independently develop a density standard liquid. In 2009, the Photovoltaic Test Laboratory received TAF certification and began to provide testing services to domestic industries. In 2010, ITRI collaborated with the US NIST on the world’s first non-stationary signal dual comb rangefinder system. In addition to being applied in light frequency testing for laser spectroscopy, the system could also be applied in optical atomic clocks, breath component molecular analysis (for disease diagnosis), fiber-optic communications, and LIDAR (for orientation and rangefinding).
In 2012, the LED Lighting Testing Laboratory obtained IECEE CBTL certifications, making it Taiwan’s first international-level LED lighting test lab to meet IECEE standards. The laboratory provided internationally recognized standard tests for domestic LED manufacturers. In response to semiconductor process miniaturization trends, in 2015 ITRI developed a new generation liquid nanoparticle monitoring system the SuperSizer which can measure particles as small as 5 nanometers. This allowed the semiconductor industry to “see” smaller particles and solve process bottlenecks. The technology was transferred to spin-off company Innovative Nanotech in 2017 and used to monitor advanced process yield.
Another 2017 ITRI spinoff company was FlowVIEW Tek, which specializes in using microscopic microfluidic chip system technology to overcome the challenge of liquid samples normally being impossible to examine with an electron microscope in a vacuum environment.
In 2022, ITRI achieved TAF certification and became a greenhouse gas verification agency. From then on, it has provided domestic businesses with carbon footprint verification services that satisfy international standards. In the same year the Institute also developed X-ray metrology for 2 nm GAA process and online wafer-level high aspect ratio TSV testing technology. Both were significant breakthrough solutions for semiconductor advanced process yield.